Calibration PSL Wafer Standards
$0.00
Our Calibration PSL Wafer Standards are deposited with polystyrene micro-spheres or silica microspheres, which support Metrology Managers that need to calibrate the size response of their Wafer Inspection Systems and Scanning Surface Inspection Systems (SSIS) with NIST Traceable size accuracy, using particle size standards with narrow size distributions.
Calibration PSL Wafer Standards are used to calibrate the size accuracy and defect response of Wafer Inspection Systems and Scanning Surface Inspection Systems (SSIS). PSL Wafer Calibration Standards are produced on 300mm, 200mm, 150mm, 100mm, 75mm prime silica wafers, customer Quartz Masks and customer Film Deposited Wafers. Polystyrene Micro-spheres are the typical particle deposition for low laser power SSIS tools, while Silica Particles are used for PSL Wafer Standards produced to calibrate high power, SSIS tools. These sophisticated wafer inspection tools are provided by manufacturers such as KLA, KLA-Tencor, Hitachi, Applied Materials, Tokyo Electron, etc.
Additional information
| Weight | 2 lbs |
|---|